We support MBI through in-house fabrication, collaboration and outsourcing. Our scope of work is vast- from discussions with PIs and students about their design requirements to translating these designs into AutoCAD/L-Edit drawings, to processing the end result to photomask writing, wafer fabrication, molding (if necessary) and characterization.
We also develop and investigate new fabrication techniques and optimize processes for various novel applications in mechanobiology.
We have following facilities to support our work:
In-house (Shared with Nanocore)
Our facility consists of a class 10K cleanroom (shared with NANOCORE T-Lab Level 11) with the following equipment: Laser writer (Heidelberg DWL66 fs) with gray scale capabilities; Mask aligner (MJB4) with Deep UV option; Spin coater (CEE); Hot plates; Spin dryer; Contact Profiler (Dektat); Wet bench (Solvent/Acid hood); Scanning electron microscope (Joel); Optical microscope (Olympus); Metal evaporator (E beam).
As an independent facility, we have mask drawing tools and a separate fabrication room for PDMS molding. All these facilities are located on T-Lab Level 9. Specifically, we have: Photomask drawing tools (L-edit and AutoCAD); PDMS molding station (spin coater, oven, degasser and weighing scale); UV lamp station; and an Oxygen plasma setup.
The MBI Nano and Microfabrication Core works in collaboration with the Institute of Materials Research and Engineering (IMRE-ASTAR) to create nano/sub-micron fabrication and multi architecture chips, as well as the Nanyang Technological University for silicon etching (deep reactive ion etching). These facilities also act as a standby facilities for the core.
We also outsource some specialized processes to ASTAR institutes like Institute of Microelectronics (IME), Data Storage Institute (DSI) and independent manufacturers.
The Nano and Microfabrication Core helps with the design and fabrication of innovative devices to further our biological understanding of the cell. Our focus lies, but not limited to, topological features; geometrical stamps for protein stamping; pillars for mechanical sensing, as well as microfluidic devices for controlled cell experiments.
From microfabrication point of view, there are multiple ongoing projects at MBI:
• Micro pillars
• Geometrical patterns for protein stamping (PDMS stamping; UV stamping)
• Micro fluidic devices
• Multi architecture chip (MARC)
• Surface topography (Diffuser lithography; Thermal reflow; Gray scale lithography)
Article by Ashraf Mohammed